Patent Assignment
Reel/Frame 025156/0387
Assignment of Assignor's Interest
Recorded: 2010-10-15
Pages: 5
Assignee
TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
Covered Property
(1)
Contact Plug Structure, Semiconductor Device, and Method for Forming Contact Plug
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.