Patent Assignment
Reel/Frame 025164/0836
Assignment of Assignor's Interest
Recorded: 2010-10-20
Pages: 8
Assignors
MATSUMOTO, NAOKI
Executed: 2010-08-11
TAKAI, KAZUTO
Executed: 2010-08-19
KO, REIKA
Executed: 2010-08-30
OKAYAMA, NOBUYUKI
Executed: 2010-08-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Apparatus and Plasma Etching Method