Patent Assignment
Reel/Frame 025170/0753
Assignment of Assignor's Interest
Recorded: 2010-10-20
Pages: 4
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization