Patent Assignment
Reel/Frame 025172/0051
Assignment of Assignor's Interest
Recorded: 2010-10-21
Pages: 6
Assignors
DEN BOEF, ARIE JEFFREY
Executed: 2010-10-15
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2010-10-14
VAN DE KERKHOF, MARCUS ADRIANUS
Executed: 2010-10-05
PELLEMANS, HENRICUS PETRUS MARIA
Executed: 2010-10-13
EBERT, MARTIN
Executed: 2010-10-13
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Assessing a Model of a Substrate, an Inspection Apparatus and a Lithographic Apparatus