Patent Assignment
Reel/Frame 025172/0098
Assignment of Assignor's Interest
Recorded: 2010-10-21
Pages: 4
Assignors
LIN, CHUNG-HSIEN
Executed: 2010-10-15
CHU, CHIA-HUA
Executed: 2010-10-15
CHENG, CHUN-WEN
Executed: 2010-10-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Mems Device with Release Aperture