Patent Assignment
Reel/Frame 025182/0869
Assignment of Assignor's Interest
Recorded: 2010-10-22
Pages: 3
Assignor
SINGH, HARMEET
Executed: 2010-10-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods of Fault Detection for Multiplexed Heater Array