Patent Assignment
Reel/Frame 025184/0759
Assignment of Assignor's Interest
Recorded: 2010-10-23
Pages: 2
Assignors
BIHR, JOHANNES
Executed: 2007-11-22
PANTELEIT, FRIEDHELM
Executed: 2007-11-23
CLAUSS, TOBIAS
Executed: 2007-11-27
BUDACH, MICHAEL
Executed: 2007-12-07
Assignee
CARL ZEISS NTS GMBH
CARL-ZEISS-STRASSE 56, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Electron Microscope for Inspecting and Processing of an Object with Miniaturized Structures and Method Thereof