Patent Assignment
Reel/Frame 025201/0978
Assignment of Assignor's Interest
Recorded: 2010-10-27
Pages: 4
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, LEGAL AFFAIRS DEPT., SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
System and Method for Current-Based Plasma Excursion Detection