Patent Assignment
Reel/Frame 025209/0479
Assignment of Assignor's Interest
Recorded: 2010-10-28
Pages: 3
Assignors
LEE, JEONG-YUN
Executed: 2010-10-15
TOKASHIKI, KEN
Executed: 2010-10-15
SHIN, KYOUNG-SUB
Executed: 2010-10-15
YOON, JUN-HO
Executed: 2010-10-15
CHO, HONG
Executed: 2010-10-15
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU,, GYEONGGI-DO, SUWON-SI, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Fabricating Semiconductor Device and Synchronous Pulse Plasma Etching Equipment for the Same