Patent Assignment
Reel/Frame 025219/0527
Assignment of Assignor's Interest
Recorded: 2010-10-29
Pages: 3
Assignors
SATO, HIROSHI
Executed: 2010-09-01
ITOH, HITOSHI
Executed: 2010-09-01
MATSUMOTO, KENJI
Executed: 2010-09-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Semiconductor Manufacturing Apparatus, and Storage Medium