Patent Assignment
Reel/Frame 025224/0164
Assignment of Assignor's Interest
Recorded: 2010-11-01
Pages: 2
Assignee
CARL ZEISS NTS GMBH
CARL-ZEISS-STRASSE 56, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.