Patent Assignment
Reel/Frame 025242/0111
Assignment of Assignor's Interest
Recorded: 2010-11-03
Pages: 4
Assignors
YAMAZAKI, SHUNPEI
Executed: 2010-09-13
SUZUKI, YUKIE
Executed: 2010-09-13
ARAI, YASUYUKI
Executed: 2010-09-13
INOUE, TAKAYUKI
Executed: 2010-09-13
KIKUCHI, ERUMU
Executed: 2010-09-13
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Microcrystalline Semiconductor Film and Thin Film Transistor