Assignment of Assignor's Interest

Recorded: 2010-11-11 Pages: 2

Assignors

YAMAGUCHI, NOBUO

Executed: 2010-10-26

TSUNEKAWA, KOJI

Executed: 2010-10-26

WATANABE, NAOKI

Executed: 2010-10-23

KOSUDA, MOTOMU

Executed: 2010-10-26

Assignee

CANON ANELVA CORPORATION

5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN

Covered Property (1)

Sputtering Apparatus and Recording Medium for Recording Control Program Thereof

Application: 12/934,497 →

Publication: US 2011/0042209