Patent Assignment
Reel/Frame 025348/0878
Assignment of Assignor's Interest
Recorded: 2010-11-11
Pages: 2
Assignor
YANG, HSUEH-AN
Executed: 2010-11-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Wafer Level Packaging of Micro-Electro-Mechanical Systems (Mems) and Complementary Metal-Oxide-Semiconductor (Cmos) Substrates