Patent Assignment
Reel/Frame 025371/0925
Assignment of Assignor's Interest
Recorded: 2010-11-18
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Method for Using First-Principles Simulation to Control a Semiconductor Manufacturing Process via a Simulation Result or a Derived Empirical Model
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.