Assignment of Assignor's Interest

Recorded: 2010-11-17 Pages: 6

Assignors

ANTONI, MARTIN

Executed: 2003-06-02

SINGER, WOLFGANG

Executed: 2003-06-03

WANGLER, JOHANNES

Executed: 2003-06-02

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Illumination System Particularly for Microlithography

Patent: 42,065 →

Application: 11/981,032 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.