Patent Assignment
Reel/Frame 025395/0003
Assignment of Assignor's Interest
Recorded: 2010-11-23
Pages: 6
Assignors
ARNOLD, JOHN C.
Executed: 2010-11-16
BURNS, SEAM D/
Executed: 2010-11-22
COLBURN, MATTHEW E.
Executed: 2010-11-16
HOLMES, STEVEN J.
Executed: 2010-11-16
YIN, YUNPENG
Executed: 2010-11-16
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Tone Inversion with Partial Underlayer Etch for Semiconductor Device Formation