Patent Assignment
Reel/Frame 025409/0453
Assignment of Assignor's Interest
Recorded: 2010-11-19
Pages: 5
Assignors
EHM, DIRK HEINRICH
Executed: 2010-11-08
KALLER, JULIAN
Executed: 2010-11-09
SCHMIDT, STEFAN
Executed: 2010-11-18
WIESNER, STEFAN
Executed: 2010-11-09
CZAP, ALMUT
Executed: 2010-11-15
CHUNG, HIN-YIU ANTHONY
Executed: 2010-11-08
KOEHLER, STEFAN
Executed: 2010-11-09
KRAUS, DIETER
Executed: 2010-11-10
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Cleaning Module and Euv Lithography Device with Cleaning Module
Application:
12/893,762 →
Publication:
US 2011/0058147
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.