Patent Assignment
Reel/Frame 025416/0336
Assignment of Assignor's Interest
Recorded: 2010-12-01
Pages: 4
Assignors
KANG, MICHAEL S.
Executed: 2010-11-29
KELLOGG, MICHAEL C.
Executed: 2010-11-29
SALDANA, MIGUEL A.
Executed: 2010-11-29
TAYLOR, TRAVIS R.
Executed: 2010-11-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Edge Ring Assembly for Plasma Etching Chambers