Patent Assignment
Reel/Frame 025433/0388
Assignment of Assignor's Interest
Recorded: 2010-11-30
Pages: 3
Assignors
TAKECHI, HIROAKI
Executed: 2010-11-04
TAKAHASHI, NORIO
Executed: 2010-11-04
KIYOSAWA, WATARU
Executed: 2010-11-04
MARUYAMA, SHIGENAO
Executed: 2010-11-04
KOMIYA, ATSUKI
Executed: 2010-11-04
Assignees
KELK LTD.
3-25-1 SHINOMIYA,, HIRATSUKA-SHI, KANAGAWA, 254-8543, JAPAN
TOHOKU UNIVERSITY
2-1-1 KATAHIRA, AOBA-KU,, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
Covered Property
(1)
Apparatus and Method for Controlling Temperature of Semiconductor Wafers