Patent Assignment
Reel/Frame 025460/0036
Assignment of Assignor's Interest
Recorded: 2010-12-07
Pages: 3
Assignors
AKAE, NAONORI
Executed: 2010-10-07
HIROSE, YOSHIRO
Executed: 2010-10-07
TAKASAWA, YUSHIN
Executed: 2010-10-07
OTA, YOSUKE
Executed: 2010-10-07
SASAJIMA, RYOTA
Executed: 2010-10-07
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.