Patent Assignment
Reel/Frame 025466/0204
Assignment of Assignor's Interest
Recorded: 2010-12-07
Pages: 5
Assignors
KOIDE, TATSUHIKO
Executed: 2010-09-13
KIMURA, SHINSUKE
Executed: 2010-09-13
OGAWA, YOSHIHIRO
Executed: 2010-09-13
OKUCHI, HISASHI
Executed: 2010-09-15
TOMITA, HIROSHI
Executed: 2010-09-21
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Surface Treatment Apparatus and Method for Semiconductor Substrate
Application:
12/887,332 →
Publication:
US 2011/0139192