Patent Assignment
Reel/Frame 025478/0270
Assignment of Assignor's Interest
Recorded: 2010-12-08
Pages: 3
Assignors
LEE, WONCHUL
Executed: 2010-06-21
FU, QIAN
Executed: 2010-06-21
LIU, SHENJIAN
Executed: 2010-06-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Pulsed Bias Plasma Process to Control Microloading
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.