Patent Assignment
Reel/Frame 025494/0761
Assignment of Assignor's Interest
Recorded: 2010-12-13
Pages: 4
Assignors
GAFF, KEITH WILLIAM
Executed: 2010-12-10
SINGH, HARMEET
Executed: 2010-12-10
COMENDANT, KEITH
Executed: 2010-12-10
VAHEDI, VAHID
Executed: 2010-12-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Adjusting Substrate Temperature to Improve Cd Uniformity