Patent Assignment
Reel/Frame 025508/0061
Assignment of Assignor's Interest
Recorded: 2010-12-15
Pages: 5
Assignors
VAN DE KERKHOF, MARCUS ADRIANUS
Executed: 2010-11-18
VAN DER SCHAAR, MAURITS
Executed: 2010-11-18
FUCHS, ANDREAS
Executed: 2010-11-18
COOGANS, MARTYN JOHN
Executed: 2010-11-18
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Apparatus and Method of Measuring a Property of a Substrate