Patent Assignment
Reel/Frame 025532/0860
Assignment of Assignor's Interest
Recorded: 2010-12-21
Pages: 3
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Analyzing Masks for Photolithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.