Patent Assignment
Reel/Frame 025535/0818
Assignment of Assignor's Interest
Recorded: 2010-12-22
Pages: 2
Assignors
KRAUS, HARALD
Executed: 2010-12-07
NARDONI, MARCO
Executed: 2010-12-07
BRUGGER, MICHAEL
Executed: 2010-12-07
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Wafer Wet Processing