Patent Assignment
Reel/Frame 025542/0287
Assignment of Assignor's Interest
Recorded: 2010-12-28
Pages: 4
Assignors
POORTINGA, ERIC
Executed: 2010-12-05
SCHERUEBL, THOMAS
Executed: 2010-10-15
RICHTER, RIGO
Executed: 2010-10-18
SEYFARTH, ARNE
Executed: 2010-10-19
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Emulation of a Photolithographic Process and Mask Inspection Microscope for Performing the Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.