Patent Assignment
Reel/Frame 025553/0608
Assignment of Assignor's Interest
Recorded: 2010-12-29
Pages: 4
Assignors
SCHERUEBL, THOMAS
Executed: 2010-12-14
SEITZ, HOLGER
Executed: 2010-12-22
STROESSNER, ULRICH
Executed: 2010-12-15
ZIBOLD, AXEL
Executed: 2010-12-20
RICHTER, RIGO
Executed: 2010-12-15
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method and Apparatus for Measuring of Masks for the Photo-Lithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.