Patent Assignment
Reel/Frame 025567/0349
Assignment of Assignor's Interest
Recorded: 2010-12-23
Pages: 3
Assignor
FARLEY, MARVIN
Executed: 2010-12-20
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Dose Measurement Method using Calorimeter
Application:
12/977,269 →
Publication:
US 2012/0161037
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.