Patent Assignment
Reel/Frame 025572/0410
Assignment of Assignor's Interest
Recorded: 2011-01-03
Pages: 6
Assignors
TSUJIMOTO, HIROSHI
Executed: 2010-11-16
KOBAYASHI, MAKOTO
Executed: 2010-12-13
TAMURA, JUN
Executed: 2010-11-16
WADA, NOBUHIRO
Executed: 2010-11-18
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Measuring Distance Between Electrodes, and Storage Medium Storing Program