Patent Assignment
Reel/Frame 025584/0383
Assignment of Assignor's Interest
Recorded: 2011-01-05
Pages: 7
Assignors
CHANG, ELLIS
Executed: 2011-01-04
WIDMANN, AMIR
Executed: 2011-01-05
PARK, ALLEN
Executed: 2011-01-04
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Inspection Guided Overlay Metrology