Patent Assignment
Reel/Frame 025588/0912
Assignment of Assignor's Interest
Recorded: 2011-01-05
Pages: 2
Assignee
SUMITOMO HEAVY INDUSTRIES, LTD.
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method