Patent Assignment
Reel/Frame 025596/0940
Assignment of Assignor's Interest
Recorded: 2011-01-06
Pages: 4
Assignors
YAMAZAWA, YOHEI
Executed: 2010-12-08
KOSHIMIZU, CHISHIO
Executed: 2010-12-08
DENPOH, KAZUKI
Executed: 2010-12-08
YAMAWAKU, JUN
Executed: 2010-12-08
SAITO, MASASHI
Executed: 2010-12-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method