Patent Assignment
Reel/Frame 025610/0896
Assignment of Assignor's Interest
Recorded: 2011-01-10
Pages: 4
Assignee
SUMCO CORPORATION
2-1, SHIBAURA 1-CHOME, MINATO-KU,, TOKYO, 105-8634, JAPAN
Covered Property
(1)
Method for Manufacturing Epitaxial Wafer and Wafer Holder Used in the Method