IP Library › Assignment 025618/0906
Patent Assignment
Reel/Frame 025618/0906

Assignment of Assignor's Interest

Recorded: 2011-01-11 Pages: 3
Assignor
EHM, DIRK HEINRICH
Executed: 2008-05-08
Assignee
CARL ZEISS SMT AG
RUDOLF EBER STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Lithographic Apparatus Comprising an Internal Sensor and a Mini-Reactor, and Method for Treating a Sensing Surface of the Internal Sensor
Patent: 8,928,855 →
Application: 12/937,498 →
Publication: US 2011/0037961
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Jan 11, 2011
From: MOORS, JOHANNES HUBERTUS JOSEPHINA; WOLSCHRIJN, BASTIAAN THEODOOR
To: ASML NETHERLANDS B.V.
Reel/Frame 025618/0939 →
A Modifying Conversion Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →