Patent Assignment
Reel/Frame 025623/0813
Assignment of Assignor's Interest
Recorded: 2011-01-12
Pages: 6
Assignors
SLEVIN, DAMIEN
Executed: 2010-10-26
LAIRD, BRAD
Executed: 2010-10-26
BAILEY, CURTIS
Executed: 2011-01-11
LI, MING
Executed: 2010-11-05
REDDY, SIRISH
Executed: 2010-10-26
SIMS, JAMES
Executed: 2010-11-22
SABRI, MOHAMED
Executed: 2010-10-26
SANGPLUG, SAANGRUT
Executed: 2010-10-26
Assignee
NOVELLUS SYSTEMS INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Precursor Vapor Generation and Delivery System with Filters and Filter Monitoring System