Patent Assignment
Reel/Frame 025624/0840
Assignment of Assignor's Interest
Recorded: 2011-01-12
Pages: 4
Assignors
YAMAZAKI, SHUNPEI
Executed: 2010-11-25
SAKATA, JUNICHIRO
Executed: 2010-12-03
TAKAYAMA, TORU
Executed: 2010-12-01
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Element and Semiconductor Device, and Deposition Apparatus