Patent Assignment
Reel/Frame 025630/0152
Assignment of Assignor's Interest
Recorded: 2010-12-21
Pages: 3
Assignors
HAWRYLUK, ANDREW M.
Executed: 2010-12-20
HSIEH, ROBERT L
Executed: 2010-12-20
FLACK, WARREN W.
Executed: 2010-12-20
Assignee
ULTRATECH, INC
3050 ZANKER ROAD, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Photolithographic Led Fabrication Using Phase-Shift Mask