Patent Assignment
Reel/Frame 025635/0302
Assignment of Assignor's Interest
Recorded: 2011-01-13
Pages: 5
Assignors
WILKLOW, RONALD A.
Executed: 2009-04-07
NELSON, MICHAEL L.
Executed: 2009-06-07
PERRY, MICHAEL
Executed: 2009-04-09
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Euv Reticle Substrates with High Thermal Conductivity