Patent Assignment
Reel/Frame 025639/0636
Assignment of Assignor's Interest
Recorded: 2011-01-14
Pages: 3
Assignors
LIN, BURN JENG
Executed: 2011-01-10
GAU, TSAI-SHENG
Executed: 2011-01-10
LIU, RU-GUN
Executed: 2011-01-10
HUANG, WEN-CHUN
Executed: 2011-01-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method for Metal Correlated via Split for Double Patterning