Patent Assignment
Reel/Frame 025657/0274
Assignment of Assignor's Interest
Recorded: 2011-01-19
Pages: 4
Assignor
QU, HONGWEI
Executed: 2010-12-13
Assignee
OAKLAND UNIVERSITY
544 O'DOWD HALL, ROCHESTER, MICHIGAN, 48309
Covered Property
(1)
Method of Wafer-Level Fabrication of Mems Devices