Patent Assignment
Reel/Frame 025663/0959
Assignment of Assignor's Interest
Recorded: 2011-01-19
Pages: 6
Assignors
KAUSHAL, SANJEEV
Executed: 2011-01-17
PATEL, SUKESH JANUBHAI
Executed: 2011-01-03
SUGISHIMA, KENJI
Executed: 2010-12-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Tool Performance by Linking Spectroscopic Information with Tool Operational Parameters and Material Measurement Information