Patent Assignment
Reel/Frame 025668/0934
Assignment of Assignor's Interest
Recorded: 2011-01-20
Pages: 6
Assignors
MATSUMOTO, NAOKI
Executed: 2011-01-12
KATO, KAZUYUKI
Executed: 2011-01-12
SHIKATA, MASAFUMI
Executed: 2011-01-09
TAKAI, KAZUTO
Executed: 2011-01-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus