Patent Assignment
Reel/Frame 025670/0717
Assignment of Assignor's Interest
Recorded: 2011-01-20
Pages: 2
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2006-07-10
DEN BOEF, ARIE JEFFREY
Executed: 2006-07-10
MOS, EVERHARDUS CORNELIS
Executed: 2006-07-10
KEIJ, STEFAN CAROLUS JACOBUS ANTONIUS
Executed: 2006-07-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Substrate Used in a Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization