Patent Assignment
Reel/Frame 025680/0631
Assignment of Assignor's Interest
Recorded: 2011-01-21
Pages: 5
Assignors
LI, MING
Executed: 2011-01-21
KANG, HU
Executed: 2011-01-18
SRIRAM, MANDYAM
Executed: 2011-01-18
LA VOIE, ADRIEN
Executed: 2011-01-18
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Plasma-Activated Deposition of Conformal Films