Patent Assignment
Reel/Frame 025683/0928
Assignment of Assignor's Interest
Recorded: 2011-01-24
Pages: 3
Assignors
SATO, TETSUJI
Executed: 2010-12-01
KITAZAWA, TAKASHI
Executed: 2010-12-01
YOSHIMURA, AKIHIRO
Executed: 2010-12-01
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Mounting Table of Substrate Processing Apparatus