Assignment of Assignor's Interest

Recorded: 2011-01-25 Pages: 2

Assignors

OTANI, YUICHI

Executed: 2011-01-06

NAKAGAWA, TAKASHI

Executed: 2011-01-20

Assignee

CANON ANELVA CORPORATION

2-5-1 KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA, 215-8550, JAPAN

Covered Property (1)

Reactive Sputtering Method and Reactive Sputtering Apparatus

Patent: 8,974,648 →

Application: 12/974,923 →

Publication: US 2011/0155561