Patent Assignment
Reel/Frame 025716/0355
Assignment of Assignor's Interest
Recorded: 2011-01-19
Pages: 2
Assignors
GOTTSCHO, RICHARD
Executed: 2010-12-13
DHINDSA, RAJINDER
Executed: 2010-12-01
SRINIVASAN, MUKUND
Executed: 2011-01-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538 U.S.
Covered Property
(1)
Small Plasma Chamber Systems and Methods