Patent Assignment
Reel/Frame 025717/0004
Assignment of Assignor's Interest
Recorded: 2011-01-28
Pages: 3
Assignor
UEDA, SHINTARO
Executed: 2011-01-27
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Depositing Film by Atomic Layer Deposition with Pulse-Time-Modulated Plasma